SILICON MICROMACHINING
621.3815 / EL87S
Elwenspoek,M.
SILICON MICROMACHINING / .- Cambridge Univ. Press, Cambridge, 1998 .- xiii,405 . .- ( Cambridge Studies In Semiconductor Physics And Microelectronic Engineering
ISBN: 052159054X
Subject Headings:
Silicon;
Micromachining;
Etching;
Author Added Entry:
Jansen,H V;
Copy Details:
Acc. No.: A130019, Full Call No.: 621.3815 EL87S, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Elwenspoek,M.
SILICON MICROMACHINING / .- Cambridge Univ. Press, Cambridge, 1998 .- xiii,405 . .- ( Cambridge Studies In Semiconductor Physics And Microelectronic Engineering
ISBN: 052159054X
Subject Headings:
Silicon;
Micromachining;
Etching;
Author Added Entry:
Jansen,H V;
Copy Details:
Acc. No.: A130019, Full Call No.: 621.3815 EL87S, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------