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METAL IMPURITIES IN SILICON-DEVICE FABRICATION

621.38152 / G758M2
Graff,Klaus
METAL IMPURITIES IN SILICON-DEVICE FABRICATION / .- 2nd rev. .- Springer-Verlag, Berlin, 2000 .- xv,268 .
ISBN: 3540642137
Subject Headings:
Semiconductors -- Defects;
Silicon -- Defects;
Silicon -- Inclusions;
Copy Details:
Acc. No.: A131369, Full Call No.: 621.38152 G758M2, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
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METAL IMPURITIES IN SILICON-DEVICE FABRICATION