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NANOLITHOGRAPHY AND PATTERNING TECHNIQUES IN MICROELECTRONICS

621.381531 / N157
Bucknall,David G.
NANOLITHOGRAPHY AND PATTERNING TECHNIQUES IN MICROELECTRONICS / .- Woodhead Publishing Ltd., Cambridge, 2005 .- xiv,409 .
ISBN: 1855739313
Subject Headings:
Molecular Electronics;
Microlithography;
Nanotechnology;
Copy Details:
Acc. No.: A153821, Full Call No.: 621.381531 N157, Item type: Books , Location: General Stacks,
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NANOLITHOGRAPHY AND PATTERNING TECHNIQUES IN MICROELECTRONICS