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FUNDAMENTAL ELECTRON INTERACTIONS WITH PLASMA PROCESSING GASES

539.757 / C467F
Christophorou,Loucas G.
FUNDAMENTAL ELECTRON INTERACTIONS WITH PLASMA PROCESSING GASES / .- Kluwer Academic / Plenum Publishers, New York, 2004 .- xii,776 .
ISBN: 0306480379
Subject Headings:
Electron-Molecule Collisions;
Plasma (Ionized Gases);
Author Added Entry:
Olthoff,James K.;
Copy Details:
Acc. No.: A157270, Full Call No.: 539.757 C467F, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
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FUNDAMENTAL ELECTRON INTERACTIONS WITH PLASMA PROCESSING GASES