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Ceramic thick films for MEMS and microdevices

621.38152 / D731c
Dorey, Robert
       Ceramic thick films for MEMS and microdevices / Robert Dorey .- Amsterdam: Elsevier, 2012 .- xviii, 191p . .- ( Micro And Nano Technology Series
ISBN: 9781437778175
Subject Headings:
Ceramic coating.;
Copy Details:
Acc. No.: A173368, Full Call No.: 621.38152 D731c, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
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