ELECTRON-BEAM TECHNOLOGY IN MICROELECTRONIC FABRICATION (Record no. 283278)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00442pam a2200157a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 160408b1980 xxu||||| |||| 00| 0 eng d |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3817 |
| Item number | EL25t |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Brewer, George Raymond |
| 245 1# - TITLE STATEMENT | |
| Title | ELECTRON-BEAM TECHNOLOGY IN MICROELECTRONIC FABRICATION |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York |
| Name of publisher, distributor, etc. | Academic |
| Date of publication, distribution, etc. | 1980 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xi,362 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microelectronics |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Lithography, Electron Beam |
| 964 ## - | |
| -- | CIRC |
| 997 ## - | |
| -- | A65420 C |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| General Stacks | PK Kelkar Library, IIT Kanpur | PK Kelkar Library, IIT Kanpur | 12/08/2007 | 621.3817 EL25t | A65420 | 08/04/2016 | 08/04/2016 | Books |