MICROLITHOGRAPHY FUNDAMENTALS IN SEMICONDUCTOR DEVICES AND FABRICATION TECHNOLOGY (Record no. 331067)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00578pam a2200181a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 160408b1998 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0824799518 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | N733M |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Nonogaki,Saburo, Ueno,Takumi |
| 245 1# - TITLE STATEMENT | |
| Title | MICROLITHOGRAPHY FUNDAMENTALS IN SEMICONDUCTOR DEVICES AND FABRICATION TECHNOLOGY |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | |
| Name of publisher, distributor, etc. | Marcel Dekker, New York |
| Date of publication, distribution, etc. | 1998 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | iv,327 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductors -- Design And Construction |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microlithography -- Industrial Application |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Ito,Toshio |
| 964 ## - | |
| -- | CIRC |
| 997 ## - | |
| -- | A126689 C |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| General Stacks | PK Kelkar Library, IIT Kanpur | PK Kelkar Library, IIT Kanpur | 12/08/2007 | 621.38152 N733M | A126689 | 08/04/2016 | 08/04/2016 | Books |