Optical lithography (Record no. 367493)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00453pam a2200157a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 160408b2010 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780819475602 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | IIT, Kanpur |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.381531 |
| Item number | L63o |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Lin, Burn J. |
| 245 0# - TITLE STATEMENT | |
| Title | Optical lithography |
| Remainder of title | here is why |
| Statement of responsibility, etc. | Burn J. Lin |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Washington |
| Name of publisher, distributor, etc. | Spie Press |
| Date of publication, distribution, etc. | 2010 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xiv, 477p |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Microlithography |
| 997 ## - | |
| -- | A169582 C |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Date acquired | Source of acquisition | Cost, normal purchase price | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| General Stacks | PK Kelkar Library, IIT Kanpur | PK Kelkar Library, IIT Kanpur | 10/05/2010 | Vikram Book Depot | 3955.14 | 621.381531 L63o | A169582 | 08/04/2016 | 08/04/2016 | Books |