Handbook of cleaning for semiconductor manufacturing (Record no. 369025)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00596pam a2200169a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 160408b2011 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9780470625958 |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | IIT, Kanpur |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Item number | R275h |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Reinhardt, Karen A. |
| 245 0# - TITLE STATEMENT | |
| Title | Handbook of cleaning for semiconductor manufacturing |
| Remainder of title | fundamentals and applications |
| Statement of responsibility, etc. | Karen A. Reinhardt and Richard F. Reidy |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New Jersey |
| Name of publisher, distributor, etc. | John Wiley & Sons |
| Date of publication, distribution, etc. | 2011 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | xxii, 590p |
| 630 #0 - SUBJECT ADDED ENTRY--UNIFORM TITLE | |
| Uniform title | Semiconductors |
| -- | Optoelectronics |
| 700 ## - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Reidy, Richard F. |
| 997 ## - | |
| -- | A171313 C |
| Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Date acquired | Source of acquisition | Cost, normal purchase price | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| General Stacks | PK Kelkar Library, IIT Kanpur | PK Kelkar Library, IIT Kanpur | 22/03/2011 | D.S. Information Services Pvt. Ltd. | 11384.28 | 621.38152 R275h | A171313 | 08/04/2016 | 08/04/2016 | Books |