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Silicon processing for VLSI ERA [v.1] (Record no. 370951)

MARC details
000 -LEADER
fixed length control field 00650pam a2200193a 44500
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION
fixed length control field 160408b1986 xxu||||| |||| 00| 0 eng d
040 ## - CATALOGING SOURCE
Original cataloging agency P K Kelkar Library, IIT Kanpur
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER
Classification number 621.38173
Item number W831s2
100 ## - MAIN ENTRY--PERSONAL NAME
Personal name Wolf, Stanley
245 0# - TITLE STATEMENT
Title Silicon processing for VLSI ERA [v.1]
Statement of responsibility, etc. Stanley Wolf and Richard N. Taubner
260 ## - PUBLICATION, DISTRIBUTION, ETC.
Place of publication, distribution, etc. California
Name of publisher, distributor, etc. Lattice Press
Date of publication, distribution, etc. 1986
300 ## - PHYSICAL DESCRIPTION
Extent xxxvi, 890p
505 ## - FORMATTED CONTENTS NOTE
Formatted contents note Contents: v.1. Process technology
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Silicon
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Integrated circuits -- Very large scale integration
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM
Topical term or geographic name entry element Semi conductors -- Etching
700 ## - ADDED ENTRY--PERSONAL NAME
Personal name Taubner, Richard N.
997 ## -
-- A177279 v.1 C
Holdings
Withdrawn status Lost status Damaged status Not for loan Collection code Home library Current library Date acquired Source of acquisition Cost, normal purchase price Total Checkouts Total Renewals Full call number Barcode Date last seen Date last checked out Copy number Price effective from Koha item type
        General Stacks PK Kelkar Library, IIT Kanpur PK Kelkar Library, IIT Kanpur 03/12/2013 International Book Agency 12442.59 4 42 621.38173 W831s2 A177279 08/04/2024 31/07/2023 v.1 08/04/2016 Books

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