Deposition of thin films by sputtering (Record no. 387963)
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000 -LEADER | |
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fixed length control field | 00456pam a2200157a 44500 |
040 ## - CATALOGING SOURCE | |
Transcribing agency | IITK |
041 ## - LANGUAGE CODE | |
Language code of text/sound track or separate title | eng |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
Classification number | 669.0284 |
Item number | Sy68p |
111 ## - MAIN ENTRY--MEETING NAME | |
Meeting name or jurisdiction name as entry element | Symposium on the deposition of thin films by sputtering |
Location of meeting | Newyork |
Date of meeting | 1967 |
Number of part/section/meeting | 2nd |
245 1# - TITLE STATEMENT | |
Title | Deposition of thin films by sputtering |
260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
Place of publication | New York |
Name of publisher | Rochester |
Year of publication | 1967 |
300 ## - PHYSICAL DESCRIPTION | |
Number of Pages | 146 |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical Term | Sputtering (Physics) -- Congresses |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
Topical Term | Ion Bombardment -- Congresses |
942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
Koha item type | Books |
Withdrawn status | Lost status | Damaged status | Not for loan | Collection code | Home library | Current library | Date acquired | Full call number | Accession Number | Koha item type |
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General Stacks | PK Kelkar Library, IIT Kanpur | PK Kelkar Library, IIT Kanpur | 08/07/2012 | 669.0284 Sy68p | K14140 | Books |