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SILICON NITRIDE FOR MICROELECTRONIC APPLICATIONS

By: Material type: TextTextSeries: Handbook Of Electronic Materials ; V. 3Publication details: New York Ifi/Plenum 1971Description: v.1Subject(s): DDC classification:
  • 621.381 H191
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Contents. -- Pt. 1. Preparation And Properties -- Pt. 2. Applications And Devices

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