DRY ETCHING FOR MICROELECTRONICS
Material type:
TextSeries: Materials Processing Theory And Practices ; V. 4Publication details: Amsterdam North-Holland 1984Description: xi,299Subject(s): DDC classification: - 621.3817 D847
| Item type | Current library | Collection | Call number | URL | Status | Date due | Barcode | Item holds | |
|---|---|---|---|---|---|---|---|---|---|
Books
|
PK Kelkar Library, IIT Kanpur | COMPACT STORAGE (BASEMENT) | 621.3817 D847 (Browse shelf(Opens below)) | Link to resource | Available | A85124 |
Total holds: 0
Bibliography : P. 223-294
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