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HIGH VACUUM PRODUCTION IN THE MICROELECTRONICS INDUSTRY

By: Material type: TextTextSeries: Plasma Technology ; V. 2Publication details: Amsterdam Elsevier 1988Description: xiii,222ISBN:
  • 044442878X
Subject(s): DDC classification:
  • 621.692 D956h
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Holdings
Item type Current library Collection Call number URL Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur COMPACT STORAGE (BASEMENT) 621.692 D956h (Browse shelf(Opens below)) Link to resource Available A102341
Total holds: 0

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