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MODELLING OF FILM DEPOSITION FOR MICROELECTRONIC APPLICATIONS

By: Contributor(s): Material type: TextTextSeries: Thin Films ; V.22Publication details: Academic Press, San Diego c1996Description: xiv,291ISBN:
  • 0125330227
Subject(s): DDC classification:
  • 530.4175 M72R
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Holdings
Item type Current library Collection Call number URL Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur COMPACT STORAGE (BASEMENT) 530.4175 M72R (Browse shelf(Opens below)) Link to resource Available A122746
Total holds: 0

Includes Bibliographical References And Index

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