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HANDBOOK OF MICROLITHOGRAPHY, MICROMACHINING, AND MICROFABRICATION : MICROLITHOGRAPHY

Contributor(s): Material type: TextTextLanguage: English Publication details: Spie-Optical Engineering Press 1997 BellinghamDescription: vii, 768pISBN:
  • 0852969066
Subject(s): DDC classification:
  • 670 H192r
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Holdings
Item type Current library Collection Call number Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur General Stacks 670 H192R (Browse shelf(Opens below)) Available A126116
Total holds: 0

Includes Bibliographical References And Index

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