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PLASMA PROCESSES FOR SEMICONDUCTOR FABRICATION

By:

Hitchon,W. N.G

Material type: Text

Text

TextSeries: Cambridge Studies In Semiconductor Physics And Microelectronic Engineering ; Publication details: Cambridge Univ. Press, Cambridge 1999Description: ix,221ISBN:

0521591759

Subject(s):

DDC classification:

621.38152 H637P

Average rating: 0.0 (0 votes)

Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode	Item holds
Books	PK Kelkar Library, IIT Kanpur	General Stacks	621.38152 H637P (Browse shelf(Opens below))	Available		A128874

Total holds: 0

Includes Bibliographical References And Index

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P K Kelkar Library

Indian Institute of Technology, Kalyanpur, Kanpur, U P 208016 India| Web: https://pkklib.iitk.ac.in

Email : librarian@iitk.ac.in | Phone : +91 512 259-7233

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