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Micro process engineering : fundamentals, devices, fabrication, and applications

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Contributor(s): Material type: TextTextSeries: Advanced Micro And Nanosystems ; V.5Publication details: Weinheim Wiley-Vch 2006Description: xxii, 507pISBN:
  • 9783527312467
Subject(s): DDC classification:
  • 670.42 M583
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Holdings
Item type Current library Collection Call number Copy number Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur General Stacks 670.42 M583 (Browse shelf(Opens below)) v.5 Available A162364
Total holds: 0

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