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Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices

By: Contributor(s): Material type: TextTextPublication details: Boca Raton Crc Press 2009Description: xiii, 191pISBN:
  • 9781420059113
Subject(s): DDC classification:
  • 621.38152 P153n
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Holdings
Item type Current library Collection Call number URL Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur COMPACT STORAGE (BASEMENT) 621.38152 P153n (Browse shelf(Opens below)) Link to resource Available A165392
Total holds: 0

Includes bibliographical references and index.

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