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Predictive simulation of semiconductor processing : status and challenges

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Contributor(s): Material type: TextTextSeries: Springer Series In Materials Science / Edited By R. Hull ; Publication details: Berlin Springer 2004Description: xvii, 490pISBN:
  • 9783540204817
Subject(s): DDC classification:
  • 621.3 P912
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Holdings
Item type Current library Collection Call number URL Status Date due Barcode Item holds
Books Books PK Kelkar Library, IIT Kanpur COMPACT STORAGE (BASEMENT) 621.3 P912 (Browse shelf(Opens below)) Link to resource Available A179494
Total holds: 0

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