TY  - BOOK
AU  - Mayer, James W.
AU  - Davies, John A.
TI  - ION IMPLANTATION IN SEMICONDUCTORS
U1  - 621.38152 
PY  - 1970///
CY  - New York
PB  - Academic Press
KW  - Semiconductors
KW  - Ion Bombardment
N1  - Includes Bibliography
ER  -