621.381 / H191
Milek, John T.
SILICON NITRIDE FOR MICROELECTRONIC APPLICATIONS
/
.- New York: Ifi/Plenum, 1971
.- v. .
.- ( Handbook Of Electronic Materials V. 3
Contents. -- Pt. 1. Preparation And Properties -- Pt. 2. Applications And Devices
Subject Headings:
Silicon Nitride;
Semiconductors;
Electronics -- Materials;
Copy Details:
Acc. No.: A17082, Full Call No.: 621.381 H191, (v. 3) Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------