TY  - BOOK
AU  - Burger, Robert M.
AU  - Donovan, R. P.
TI  - FUNDAMENTALS OF SILICON INTEGRATED DEVICE TECHNOLOGY
U1  - 621.3817 
PY  - 1967///-
CY  - Englewood Cliffs, N. J.
PB  - Prentice-Hall
KW  - Microelectronics
KW  - Silicon
N1  - Contents : V. 1. Oxidation, Diffusion And Epitaxy; Includes Bibliographies; Prentice-Hall Electrical Engineering Series
ER  -