TY  - BOOK
AU  - Milek, John T.
TI  - SILICON NITRIDE FOR MICROELECTRONIC APPLICATIONS
U1  - 621.381 
PY  - 1971///
CY  - New York
PB  - Ifi/Plenum
KW  - Silicon Nitride
KW  - Semiconductors
KW  - Electronics -- Materials
N1  - Contents. -- Pt. 1. Preparation And Properties -- Pt. 2. Applications And Devices
ER  -