TY  - BOOK
AU  - Ghandhi, Sorab Khushro
TI  - VLSI fabrication principles: silicon and gallium arsenide
SN  - 0471868337
U1  - 621.38171 
PY  - 1983///
CY  - New York
PB  - John Wiley
KW  - Integrated circuits -- Very large scale integration
KW  - Silicon
KW  - Gallium Arsenide
ER  -