TY  - BOOK
AU  - 
AU  - Enspurch, Norman G., Ed.
TI  - VLSI electronics microstructure science [v.6]: materials and process characterization
U1  - 621.38173 
PY  - 1983///
CY  - New York
PB  - Academic Press
KW  - Integrated circuit -- Very large scale integration
ER  -