TY  - BOOK
AU  - Brodie, Ivor
AU  - Muray, Julius J.
TI  - PHYSICS OF MICROFABRICATION
U1  - 621.3817 
PY  - 1982///
CY  - New York
PB  - Plenum Press
KW  - Microelectronics
KW  - Thinfilm Circuits
ER  -