TY  - BOOK
AU  - Powell, Ronald A.
TI  - DRY ETCHING FOR MICROELECTRONICS
U1  - 621.3817 
PY  - 1984///
CY  - Amsterdam
PB  - North-Holland
KW  - Semiconductors -- Etching
KW  - Microelectronics
N1  - Bibliography : P. 223-294
ER  -