TY  - BOOK
AU  - Bowden, Murrae
AU  - Turner, S. Richard
TI  - POLYMERS AND HIGH TECHNOLOGY
SN  - 0841214069
U1  - 668.9 
PY  - 1986///
CY  - Anaheim
PB  - California
KW  - Polymers And Polymerization -- Cong
KW  - Photoresists -- Cong
KW  - Microlithography-Materials -- Cong
ER  -