TY  - BOOK
AU  - Duval, Pierre
TI  - HIGH VACUUM PRODUCTION IN THE MICROELECTRONICS INDUSTRY
SN  - 044442878X
U1  - 621.692 
PY  - 1988///
CY  - Amsterdam
PB  - Elsevier
KW  - Vacuum Technology
KW  - Microelectronics
ER  -