TY  - BOOK
AU  - Sze, S. M., ed.
TI  - VLSI technology [2nd ed.]
SN  - 0071003479
U1  - 621.38173 
PY  - 1988///
CY  - New York
PB  - Mcgraw-Hill
KW  - Integrated Circuits -- Very Large Scale Integration
N1  - Includes Bibliographical References And Index
ER  -