IMPURITY DIFFUSION AND GETTERING IN SILICON - Washburn, Jack, ed.; Pearce, Charles W., ed. (Materials Research Society Pittsburgh, 1985)
Includes Bibliographical References And Index.
"Proc.Of The Sym.On Impurity Diffusion And Gettering In Semiconductors...Held As Sym.C At The Mat.Res.Soc.Meeting,Nov.27-30,1984 In Boston."
Keywords: Semiconductors--Defects--Cong; Diffusion--Cong