TY  - BOOK
AU  - Washburn, Jack, ed.
AU  - Pearce, Charles W., ed.
TI  - IMPURITY DIFFUSION AND GETTERING IN SILICON
SN  - 0931837014
U1  - 621.38152 
PY  - 1985///
CY  - Pittsburgh
PB  - Materials Research Society
KW  - Semiconductors--Defects--Cong
KW  - Diffusion--Cong
N1  - Includes Bibliographical References And Index; "Proc.Of The Sym.On Impurity Diffusion And Gettering In Semiconductors...Held As Sym.C At The Mat.Res.Soc.Meeting,Nov.27-30,1984 In Boston."
ER  -