TY  - BOOK
AU  - Stievenard, D.
AU  - Bourgoin, J. C.
TI  - ION IMPLANTATION IN SEMICONDUCTORS
SN  - 087495754
U1  - 537.622 
PY  - 1989///
CY  - Aedermanndorf
PB  - Trans Tech. Pub.
KW  - Ion Inpalntation
KW  - Semiconductors
ER  -