TY  - BOOK
AU  - Luft, Werner
AU  - Tsuo, Y. Simon
TI  - HYDROGENATED AMORPHOUS SILICON ALLOY DEPOSITION PROCESSES
SN  - 0824791460
U1  - 621.38152 
PY  - 1993///
CY  - New York
PB  - Marcel Dekker
KW  - Thin Films -- Electric Properties
KW  - Silicon Alloys
N1  - Includes Bibliographical References And Index
ER  -