TY  - BOOK
AU  - Hess, Dennis W.
AU  - Jensen, Klavs F.
TI  - MICROELECTRONICS PROCESSING
SN  - 0841214751
U1  - 621.381 
PY  - 1989///
CY  - Washington, D. C.
PB  - American Chemical Society
KW  - Microelectronics -- Materials
KW  - Integrated Circuits -- Design And Construction
KW  - Surface Chemistry
ER  -