TY  - BOOK
AU  - Grovenor, C. R. M.
TI  - MICROELECTRONIC MATERIALS
SN  - 0852742703
U1  - 621.38171 
PY  - 1989///
CY  - Bristol
PB  - Institute Of Physics
KW  - Microelectronic Devices. Design And Manufacture
N1  - Includes Bibliographical References And Index
ER  -