TY  - BOOK
AU  - Stephen Rossnagel
AU  - Rossnagel,Stephen
TI  - MODELLING OF FILM DEPOSITION FOR MICROELECTRONIC APPLICATIONS
SN  - 0125330227
U1  - 530.4175 
PY  - 1996///
CY  - 
PB  - Academic Press, San Diego
KW  - Surfaces (Technology)
N1  - Includes Bibliographical References And Index
ER  -