TY  - BOOK
AU  - Giovanni No Bruno,Pio No Capezzuto,Arun No Madan
AU  - Madan,Arun
TI  - PLASMA DEPOSITION OF AMORPHOUS SILICON-BASED MATERIALS
SN  - 012137940X
U1  - 621.38152 
PY  - 1995///
CY  - 
PB  - Academic Press, Boston
KW  - Amorphous Semiconductors -- Design And Construction
KW  - Silicon Alloys
KW  - Plasma-Enhanced Chemical Vapor Deposition
ER  -