TY  - BOOK
AU  - Tanaka, K.
TI  - GLOW DISCHARGE OF HYDROGENATED AMORPHOUS SILICON
SN  - 0792303091
U1  - 621.38152 
PY  - 1989///
CY  - Tokyo
PB  - Ktk Scientific Pub.
KW  - Amorphous Semiconductors
KW  - Silicon
KW  - Glow Discharges
ER  -