TY  - BOOK
AU  - Htoo, Maung S.
TI  - MICROELECTRONIC POLYMERS
SN  - 0824779908
U1  - 621.3817 
PY  - 1989///
CY  - New York
PB  - Marcel Dekker
KW  - Polymers And Polymerization
KW  - Microlithography -- Materials
KW  - Microelectronics -- Materials
ER  -