TY  - BOOK
AU  - Lee, Hong H.
TI  - FUNDAMENTALS OF MICROELECTRONICS PROCESSING
SN  - 0070370567
U1  - 621.38171 
PY  - 1990///
CY  - New York
PB  - Mcgraw-Hill
KW  - Integrated Circuits -- Design And Construction
KW  - Integrated Circuits -- Materials
ER  -