TY  - BOOK
AU  - Kenneth A. Jackson
AU  - Cahn,R. W.
TI  - PROCESSING OF SEMICONDUCTORS
SN  - 3527268294
U1  - 621.38152 
PY  - 1996///
CY  - 
PB  - Vch Verlagsgesellschaft,Weinheim
KW  - Semiconductors
KW  - Materials
N1  - Includes Bibliographical References And Index
ER  -