TY  - BOOK
AU  - Rai-Choudhury, P. [ed.]
TI  - HANDBOOK OF MICROLITHOGRAPHY, MICROMACHINING, AND MICROFABRICATION: MICROLITHOGRAPHY
SN  - 0852969066
U1  - 670 
PY  - 1997///
CY  - Bellingham
PB  - Spie-Optical Engineering Press
KW  - Microlithography
KW  - Micromachining
KW  - Microfabrication
N1  - Includes Bibliographical References And Index
ER  -