621.38152  / N733M <br/>
Nonogaki,Saburo, Ueno,Takumi <br/>
       MICROLITHOGRAPHY FUNDAMENTALS IN SEMICONDUCTOR DEVICES AND FABRICATION TECHNOLOGY 
 / 
 .-  Marcel Dekker, New York,  1998 
 .- iv,327 . 
<br><u>ISBN:</u> 0824799518 
<br/><u>Subject Headings:</u> <br/>Semiconductors -- Design And Construction;<br/>Microlithography -- Industrial Application;
<br/><U>Author Added Entry: </u><br/>Ito,Toshio;
<br><U>Copy Details:</u><br> Acc. No.: <b>A126689</b>, Full Call No.: 621.38152 N733M,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>