TY  - BOOK
AU  - Nonogaki,Saburo, Ueno,Takumi
AU  - Ito,Toshio
TI  - MICROLITHOGRAPHY FUNDAMENTALS IN SEMICONDUCTOR DEVICES AND FABRICATION TECHNOLOGY
SN  - 0824799518
U1  - 621.38152 
PY  - 1998///
CY  - 
PB  - Marcel Dekker, New York
KW  - Semiconductors -- Design And Construction
KW  - Microlithography -- Industrial Application
ER  -