621.381531  / SU31P <br/>
Sugawara,M. <br/>
       PLASMA ETCHING 
 / FUNDAMENTALS AND APPLICATIONS 
 .-  Oxford Univ. Pr., Oxford,  c1998 
 .- viii,347 . 
.- ( Series On Semiconductor Science And Technology     
<br/>Includes Bibliographical References And Index 
<br><u>ISBN:</u> 019856287X 
<br/><u>Subject Headings:</u> <br/>Semiconductors -- Etching;<br/>Plasma Etching;
<br><U>Copy Details:</u><br> Acc. No.: <b>A126191</b>, Full Call No.: 621.381531 SU31P,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>