TY  - BOOK
AU  - Sugawara,M.
TI  - PLASMA ETCHING
SN  - 019856287X
U1  - 621.381531 
PY  - 1998///
CY  - 
PB  - Oxford Univ. Pr., Oxford
KW  - Semiconductors -- Etching
KW  - Plasma Etching
N1  - Includes Bibliographical References And Index
ER  -