TY - BOOK AU - Varadan,Vijay K,Vinoy,K J AU - Jose,K A TI - RF MEMS AND THEIR APPLICATIONS SN - 047084308X U1 - 621.38413 PY - 2003/// CY - PB - John Wiley, Chichester KW - Radio Circuits -- Equipment And Supplies KW - Microelectromechanical Systems ER -