TY  - BOOK
AU  - Tong,Q. Y.
AU  - Gosele,U.
TI  - SEMICONDUCTOR WAFER BONDING
SN  - 0471574813
U1  - 621.38152 
PY  - 1999///
CY  - 
PB  - John Wiley, New York
KW  - Semiconductors -- Bonding
KW  - Semiconductor Wafers
N1  - Includes Index
ER  -